倒装式石墨烯高压压力传感器设计及性能研究

Design and performance study of an inverted graphene high-pressure sensor

  • 摘要: 微机电系统(microelectromechanical system, MEMS)压力传感器具有体积小、响应快和易集成等优势,广泛应用于航空航天、动力装备及工业过程的压力监测。然而,传统硅基压阻式压力传感器的膜片通常兼具承压与敏感功能,难以在高压下兼顾结构强度与应变输出。针对上述问题,本文提出一种倒装式石墨烯压阻高压压力传感器,采用钢膜承压、中心突柱传力及硅基梁敏感的功能分离结构。通过有限元方法优化钢膜与梁的尺寸,分析传感器在0~20 MPa压力范围内的响应特性、无预应力模态特性及z向等效静加速度载荷干扰,并在理想应变传递且石墨烯应变因子K为2的条件下建立四分之一桥理论模型。结果表明,该传感器的应变灵敏度为1.3376×10−4 MPa−1,压力-应变拟合优度为0.99993,一阶无预应力固有频率为198.80 kHz(仅作为共振频率裕度参考),20 MPa下的理论归一化输出电压比为1.34×10−3;在非共振z向500g等效静加速度载荷作用下,钢膜最大等效应力为0.729 MPa,敏感区附加正应变为1.935×10−6,等效压力误差为0.072%FS(FS为满量程,full scale)。该结构实现了承压、传力与敏感功能的分离,可为高压及高加速度环境下的压力传感器设计提供参考。

     

    Abstract: Microelectromechanical system (MEMS) pressure sensors offer advantages such as compact size, fast response, and ease of integration, and are widely used for pressure monitoring in aerospace, power equipment, and industrial processes. However, in conventional silicon piezoresistive pressure sensors, the diaphragm typically serves both load-bearing and sensing functions, making it difficult to balance structural strength and strain output under high pressure. To address these challenges, we propose an inverted graphene piezoresistive high-pressure sensor with functionally separated load-bearing, force-transmission, and sensing components. The structure employs a steel diaphragm for pressure loading, a central post for force transmission, and silicon beams for strain sensing. Finite-element analysis is used to optimize the dimensions of the steel diaphragm and beams, evaluate the pressure response over 0–20 MPa, assess unprestressed modal characteristics and interference induced by z-direction equivalent static acceleration loads, and establish a theoretical quarter-bridge model under ideal strain transfer with a graphene gauge factor (K) of 2. The results demonstrate a strain sensitivity of 1.3376×10−4 MPa−1, a coefficient of determination of 0.99993 for the pressure-strain fit, and a first unprestressed natural frequency of 198.80 kHz, which serves as a reference for the resonance-frequency margin. Additionally, the theoretical normalized output is 1.34×10−3 at 20 MPa. Under a non-resonant z-direction equivalent static acceleration load of 500 g, the maximum equivalent stress in the steel diaphragm is 0.729 MPa, the additional normal strain in the sensing region is 1.935×10−6, and the equivalent pressure error is 0.072% of full scale (FS). By separating the load-bearing, force-transmission, and sensing functions, the proposed structure provides a reference for designing pressure sensors intended for high-pressure and high-acceleration environments.

     

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